Scrubber

Products born from clean technology meet the needs of 21st-century society

By maintaining stable supplies of high-quality gases under strict quality control, Taiyo Nippon Sanso's products continue to earn the trust of its customers. Taiyo Nippon Sanso's exhaust gas abatement systems fully capture un-reacted toxic gases from the exhaust of doping gas used in the manufacture of ICs, LSIs, VLSIs and compound semiconductors, ensuring that such exhaust is safe when discharged.

The Company's world-class gas-refining equipment represents an amalgamation of comprehensive gas technologies that successfully remove the maximum possible amount of impurities. The high-purity piping system is the result of Taiyo Nippon Sanso's own high-precision constcution technology.